Teledyne Scientific & Imaging
fabricates and manufactures Silicon microlenses using advanced
processing techniques. We use Reflow and Grayscale fabrication
methods to achieve high quality, cost efficient microlenses.
Reflow involves patterning polymeric materials on substrates
and then melting the polymer to form ideal spherical surfaces.
Lenses produced by this method have a wide range of design parameters
and numerical apertures, and aspheric design over many conic
values.
Grayscale
photolithography is used in fabricating asymmetric micro-optic
structures. This technique enables complex optical structures
to be fabricated including full fill-factor lens arrays, kinoform
and Fresnel lens patterns, concave and off-axis lenses, and diffraction
gratings.
- Refractive
and diffractive microlens arrays and optical components
- Variety
of materials including Silicon Quartz (fused Silica), many
III-V or II-VI semiconductor and polymeric materials
- Reflow
and Grayscale fabrication
- ISO 9001
certified manufacturing operation at RSC including a variety
of plasma etch/mill tools
- Class 100
cleanroom facilities, diagnostic instruments, including phase-shifting
interferometric surface profilers, AFM, SEM, and TEM instruments
- Expert
staff with knowledge of materials, optical design, modeling,
and manufacture process engineering
|
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| 200 µ microlens
arrays in fused silica |
 |
| 975 µm
f/2 microlens arrays in silicon |
 |
| 100%
fill factor, 60 µm microlens array |
 |
| Blazed
diffraction grating |
|